Eigenvalue Solution of Thermoelastic Damping in Beam Resonators Using a Finite Element Analysis
نویسندگان
چکیده
A finite element formulation is developed for solving the problem related to thermoelastic damping in beam resonator systems. The perturbation analysis on the governing equations of heat conduction, thermoleasticity, and dynamic motion leads to a linear eigenvalue equation for the exponential growth rate of temperature, displacement, and velocity. The numerical solutions for a simply supported beam have been obtained and shown in agreement with the analytical solutions found in the literature. Parametric studies on a variety of geometrical and material properties demonstrate their effects on the frequency and the quality factor of resonance. The finite element formulation presented in this work has advantages over the existing analytical approaches in that the method can be easily extended to general geometries without extensive computations associated with the numerical iterations and the analytical expressions of the solution under various boundary conditions. DOI: 10.1115/1.2748472
منابع مشابه
A finite element analysis of thermoelastic damping in vented MEMS beam resonators
The effect of geometry on thermoelastic damping in micro-beam resonators is evaluated using an eigenvalue formulation and a customized finite element method. The vented clamped–clamped (CC) and clamped-free (CF) beams with square-shaped vents along their centerlines, are both analyzed by the finite element method. The quality factor and the resonant frequency are obtained as functions of variou...
متن کاملThermo-Elastic Damping in Nano-beam Resonators Based on Nonlocal Theory
In this article thermoelastic damping in nano-beam resonators is investigated based on nonlocal theory of elasticity and the Euler-Bernoulli beam assumptions. The governing equation of deflection of the beam is obtained from shear and moment resultants and stress–strain relationship of the nonlocal elasticity model and also the governing equations of thermoelastic damping are established by usi...
متن کاملGeometric effects on thermoelastic damping in MEMS resonators
The effects of geometry on the energy dissipation induced by thermoelastic damping in MEMS resonators are investigated numerically using a finite element formulation. The perturbation analysis is applied to derive a linear eigenvalue equation for the exponentially decaying rate of the mechanical oscillation. The analysis also involves a Fourier method that reduces the dimensionality of the prob...
متن کاملDamping and Frequency Shift in Microscale Modified Couple Stress Thermoelastic Plate Resonators
In this paper, the vibrations of thin plate in modified couple stress thermoelastic medium by using Kirchhoff- Love plate theory has been investigated. The governing equations of motion and heat conduction equation for Lord Shulman (L-S) [1] theory are written with the help of Kirchhoff- Love plate theory. The thermoelastic damping of micro-beam resonators is analyzed by using the normal mode a...
متن کاملEffect of thermoelastic damping in nonlinear beam model of MEMS resonators by differential quadrature method
This paper presents a nonlinear model of a clamped-clamped microbeam actuated by an electrostatic load with stretching and thermoelastic effects. The frequency of free vibration is calculated by discretization based on the Differential Quadrature (DQ) Method. The frequency is a complex value due to the thermoelastic effect that dissipates energy. By separating the real and imaginary parts of fr...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2007